Screen-printed nanoparticle tin oxide films for high-yield sensor microsystems

Sensors and Actuators, B: Chemical

Volumn 96, Issue 1-2, 2003, Pages 94-104

  Llobet, Eduard ^a   Ivanov, Peter ^a   Vilanova, Xavier ^a   Brezmes, Jesús ^a   Hubalek, Jaromir ^b   Malysz, Karel ^b   Gràcia, Isabel ^c   Cané, Carles ^c   Correig, Xavier ^a  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Micromachined gas sensor; Nanopowder; Screen printing; Tin oxide; Volatile organic compounds

Indexed keywords

AMMONIA; MICROMACHINING; NANOSTRUCTURED MATERIALS; SCREEN PRINTING; SILICON; TIN COMPOUNDS; VAPORS; VOLATILE ORGANIC COMPOUNDS;

NANOPOWDERS;

CHEMICAL SENSORS;

EID: 0242405810     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00491-X     Document Type: Article

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