Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: A CO/CH4 high performance sensor

Thin Solid Films

Volumn 391, Issue 2, 2001, Pages 265-269

  Cerdà, J ^a   Cirera, A ^a   Vila A ^a   Cornet, A ^a   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Microdropping; Micromachined gas sensor; SnO2; Wet chemical route

Indexed keywords

CARBON MONOXIDE; DEPOSITION; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTING TIN COMPOUNDS; SUBSTRATES;

MICRODROPPING; WET CHEMICAL ROUTES;

CHEMICAL SENSORS;

EID: 0035898893     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00993-2     Document Type: Conference Paper

References (37)