A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Sensors and Actuators, B: Chemical

Volumn 49, Issue 1-2, 1998, Pages 81-87

  Sheng, Lie Yi ^a   Tang, Zhenan ^b   Wu, Jian ^a   Chan, Philip C H ^a,c,d   Sin, Johnny K O ^a,e  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^e Microelectron Devices Res Grp P   (United States)

Author keywords

Integrated gas sensor; Lower power; Maskless tin oxide sputtering

Indexed keywords

ETHANOL; HYDROGEN; OXIDES; SPUTTER DEPOSITION; THIN FILMS;

INTEGRATED GAS SENSOR; TIN OXIDE SPUTTERING;

ELECTROCHEMICAL SENSORS;

EID: 0032094416     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00092-6     Document Type: Article

References (11)

1. Wan-Young Chung, Tae-Hoon Kim, Young-Ho Hong, Duk-Dong Lee, Characterization of porous tin oxide thin films and their application to microsensor fabrication, Sensors and Actuators B, 24-25 (1995) 482-485.
2. J.S. Suehle, R.E. Cavicchi, M. Gaitan, S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing, IEEE Electron Device Lett. 3 (14) (1993) 118-120.
3. Qinghai Wu, Wen H. Ko, Micro-gas sensor for monitoring anesthetic agents, Sensors and Actuators B, 1 (1990) 183-187.
4. S. Semancik, R.E. Cavicchi, K.G. Kreider, J.S. Suehle, P. Chaparala, Selected-area deposition of multiple active films for conductometric microsensor arrays, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25-29, 1995, pp. 831-834.
5. Samuel K.H. Fung, Zhenan Tang, Philip C.H. Chan, Johnny K.O. Sin, Peter W. Cheung, Design and analysis of a micro-hot-plate for integrated gas sensor applications, Sensors and Actuators A 54 (1996) 482-487.
6. R.E. Cavicchi, J.S. Suehle, K.G. Kreider, M. Gaitan and P. Chaparala, Optimized temperature pulse sequences for the enhancement of chemically-specific response patterns from micro-hotplate gas sensors, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25-29, 1995, pp. 823-826.
7. 2 films, Sensors and Actuators A 24 (1990) 61-63.
8. 2 films on silicon substrates, Thin Solid Films, 73 (1980).
9. 2 low temperature deposition technique for integrated gas sensors, Sensors and Actuators B, 15-16 (1993) 63-67.
10. Zhenan Tang, Samuel K.H. Fung, Darwin T.W. Wong, Philip C.H. Chan, Johnny K.O. Sin, An integrated gas sensor based on tin oxide thin film and improved micro-hotplate, Sensors and Actuators B (in press).
11. Sunny S.W. Chan, Philip C.H. Chan, A resistance variation tolerant constant power heating circuit for integrated sensor applications, Tech. Digest, 23rd European Solid-State Circuits Conference (ESSCIRC'97), UK, September 1997 (in press).