A novel single chip thin film metal oxide array

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 350-355

  Wollenstein J ^a   Plaza, J A ^b   Cane C ^b   Min, Y ^c   Bottner H ^a   Tuller, H L ^c  

^a FRAUNHOFER INSTITUTE FOR PHYSICAL MEASUREMENT TECHNIQUES IPM   (Germany)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

CMOS on chip device; Gas sensor array; Metal oxides; Micro hotplate; Micromachining; Vanadium oxide

Indexed keywords

ARRAYS; MICROMACHINING; MICROPROCESSOR CHIPS; OXIDES; PATTERN RECOGNITION; SILICON WAFERS;

SENSOR CONTROL;

THIN FILMS;

EID: 0038110864     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00218-1     Document Type: Conference Paper

References (18)

1. T. Seiyama, A. Kato, K. Fujushi, M. Nagatani, A new detector for gaseous components using semiconductive thin films, Anal. Chem. 34 (1962).
2. K. Ihokura, J. Watson, Stanic Oxide Gas Sensor, CRC Press, Boca Raton, 1994.
3. Cavicchi R.E., Suehle J.S., Kreider K.G., Gaitan M., Chaparala P. Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors. Sens. Actuators B. 33:1996;142-146.
4. 2 gas sensors in temperature pulsed operation mode. Sens. Actuators B. 57:1999;130-134.
5. Suehle J., Cavicchi R.E., Gaitan M., Semancik S. Tin oxide gas sensor using micro-hotplate by CMOS technology and in-situ processing. IEEE Electron Device Lett. 14:1993;118-120.
6. Najafi N., Wise K.D., Schwank J.W. A micromachined ultra-thin-film gas detector. IEEE Trans. Electron Devices. 41:1994;1770-1777.
7. A. Götz, I. Gracia, C. Cane, E. Lora-Tamayo, Thermal and mechanical aspects for designing micromachined low-power gas sensors, in: Proceedings of the Micromechanics, Europe, 1996, pp. 267-270.
8. Lee D., Chung W., Choi M., Back J. Low-power micro gas sensor. Sens. Actuators B. 33:1996;147-150.
9. Sberveglieri G., Hellmich W., Mueller G. Silicon hotplates for metal oxide gas sensor elements. Microsyst. Technol. 3:1997;183-190.
10. Guidi V., Cardinali G.C., Dori L., Fagila G., Ferroni M., Martinelli G., Nelli P., Sberveglieri G. Thin film gas sensor implemented on a low-power-consumption micromachined silicon structure. Sens. Actuators B. 49:1998;88-92.
11. Semancik S., Cavicchi R.E., Wheeler M.C., Tiffany J.E., Poirier G.E., Walton R.M., Suehle J.S., Panchapakesan B., DeVoe D.L. Microhotplate platforms for chemical sensor research. Sens. Actuators B. 77:2001;579-591.
12. Simon I., Barsan N., Bauer M., Weimar U. Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sens. Actuators B. 73:2001;1-26.
13. http://www.microchemical.com/Technology/tech_overview.htm.
14. 2 films. Sens. Actuators B. 70:2000;196-202.
15. 3+z thin-films on standard silicon wafers, IEEE Sens. J., submitted for publication.
16. 3 (x < 0.5) J. Mater. Chem. 12:2000;667-675.
17. Y. Min, H.L. Tuller, S. Palzer, J. Wöllenstein, H. Böttner, Gas response of sputtered ZnO films and its potential applications for smart sensor devices, in: Proceedings of IMCS, 2002.
18. 5 thin films, in: Proceedings of Eurosensors, 2000, pp. 101-102.