3D nonlinear modeling of microhotplates in CMOS technology for use as metal-oxide-based gas sensors

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 190-200

  Graf, M ^a   Jurischka, R ^a   Barrettino, D ^a   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; OPTIMIZATION; POLYSILICON; TEMPERATURE DISTRIBUTION; THERMAL GRADIENTS; THREE DIMENSIONAL; TIN COMPOUNDS;

CMOS TECHNOLOGY; DIELECTRIC MEMBRANES; MICROHOTPLATES; POWER CONSUMPTION;

MICROELECTROMECHANICAL DEVICES;

EID: 12344309031     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/027     Document Type: Article

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