Pulverisation method for active layer coating on microsystems

Sensors and Actuators, B: Chemical

Volumn 84, Issue 1, 2002, Pages 78-82

  Jimenez I ^a   Cirera, A ^a   Cornet, A ^a   Morante, J R ^a   Gracia, I ^b   Cane C ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Indium oxide; Micromachined gas sensors; Pulverisation coating

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CHEMISORPTION; COATING TECHNIQUES; COMMINUTION; INDIUM COMPOUNDS; MICROMACHINING; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; SOLUTION MINING;

PULVERIZATION COATINGS;

CHEMICAL SENSORS;

EID: 0036680693     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01078-4     Document Type: Conference Paper

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