Micromachined metal oxide gas sensors: Opportunities to improve sensor performance

Sensors and Actuators, B: Chemical

Volumn 73, Issue 1, 2001, Pages 1-26

  Simon, Isolde ^a   Bârsan, Nicolae ^b   Bauer, Michael ^a   Weimar, Udo ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MICROSENSORS; OXIDES; SUBSTRATES;

METAL OXIDE GAS SENSORS;

CHEMICAL SENSORS;

EID: 0343289075     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00639-0     Document Type: Review

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