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Chemistry of Materials

Volumn 14, Issue 4, 2002, Pages 1671-1677

Use of microhotplate arrays as microdeposition substrates for materials exploration

(2) Taylor, Charles J a Semancik, Steve a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NITRIC ACID DERIVATIVE; OXIDE; TITANIUM DERIVATIVE; TITANIUM DIOXIDE;

ANALYTIC METHOD; ARTICLE; CHEMICAL STRUCTURE; ELECTRICITY; FILM; HEATING; SCANNING ELECTRON MICROSCOPY; SCREENING; TEMPERATURE DEPENDENCE; VAPOR;

EID: 0036121438 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm0108583 Document Type: Article

Times cited : (48)

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