Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 5, 2000, Pages 2441-2445

  Vincenzi, D ^a   Butturi, M A ^a   Guidi, V ^a   Carotta, M C ^a   Martinelli, G ^a   Guarnieri, V ^b   Brida, S ^b   Margesin, B ^b   Giacomozzi, F ^b   Zen, M ^b   Giusti, D ^c   Soncini, G ^c   Vasiliev, A A ^d   Pisliakov, A V ^e  

^a UNIVERSITY OF FERRARA   (Italy)

^b ITC IRST   (Italy)

^c UNIVERSITY OF TRENTO   (Italy)

^d KURCHATOV INSTITUTE   (Russian Federation)

^e CENTRAL RESEARCH INSTITUTE OF MACHINE BUILDING   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRONICS PACKAGING; ENERGY UTILIZATION; FINITE ELEMENT METHOD; MICROMACHINING; MULTILAYERS; SEMICONDUCTING TIN COMPOUNDS; SUBSTRATES; THERMODYNAMIC STABILITY;

DIELECTRIC STACKED MEMBRANES; SCREEN PRINTING;

THICK FILM DEVICES;

EID: 0034264709     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1289546     Document Type: Article

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