Thermal and gas-sensing properties of planar-type micro gas sensor

Sensors and Actuators, B: Chemical

Volumn 64, Issue 1-3, 2000, Pages 118-123

  Chung, Wan Young ^a   Lim, Jun Woo ^b   Lee, Duk Dong ^b   Miura, Norio ^c   Yamazoe, Noboru ^c  

^a Dongseo University   (South Korea)

^b Kyungpook National University   (South Korea)

^c KYUSHU UNIVERSITY   (Japan)

Author keywords

Gas sensor; Micro sensor; Planar type sensor; Spin coating

Indexed keywords

EID: 0000336195     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00493-1     Document Type: Article

References (4)

1. N. Yamazoe, N. Miura, in: S. Yamauchi (Eds.), Chemical Sensor Technology Vol. 4 Kodasa, Tokyo, 1993, pp. 19-42.
2. W.-Y. Chung, G. Sakai, K. Shimanoe, N. Miura, D.-D. Lee, N. Yamazoe, Gas sensing properties of indium oxide thin film on silicon substrate prepared by spin-coating method, Jpn. J. Appl. Phys. 37 (1998) 4994-4998.
3. 3SH, Sens. Actuators, B 24-25 (1995) 478-481.
4. 2 sol, J. Mater. Chem. 4 (4) (1994) 631-633.