Micropatterning of ferroelectric Bi4Ti3O12 using electron-beam-induced reaction of metal octylate films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 12 SUPPL. B, 1996, Pages 6579-6583

  Okamura, Soichiro ^a   Yagi, Yukie ^a   Ando, Shizutoshi ^b   Tsukamoto, Takeyo ^b   Mori, Katsumi ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Beam induced reaction; Bi4Ti3O12; Electron beam; Ferroelectric; Metal octylate; Patterning

Indexed keywords

EID: 0008319171     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.6579     Document Type: Article

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