Microfabrication of ceramics by filling of photoresist molds

Advanced Materials

Volumn 12, Issue 17, 2000, Pages 1261-1263

  Schönholzer, Urs P ^a   Hummel, René ^a   Gauckler, Ludwig J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ALUMINA; CRYSTAL STRUCTURE; DISSOLUTION; PHOTORESISTS; POLYCRYSTALLINE MATERIALS; SAPPHIRE; SILICON WAFERS; SINGLE CRYSTALS; SINTERING; ULTRAVIOLET RADIATION; ZIRCONIA;

MICROFABRICATION;

CERAMIC MATERIALS;

EID: 0037524101     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200009)12:17<1261::AID-ADMA1261>3.0.CO;2-4     Document Type: Article

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