Application of microscopic interferometry techniques in the MEMS field

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 1-16

  Bosseboeuf, Alain ^a   Petitgrand, Sylvain ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Interferogram analysis; Mechanical testing; MEMS; Optical interferometry

Indexed keywords

INTERFEROMETRY; MECHANICAL TESTING; THIN FILMS; VIBRATION MEASUREMENT; WSI CIRCUITS;

INTERFEROGRAM ANALYSIS; MICROSCOPIC INTERFEROMETRY; TRANSIENT RESPONSE MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 1342331055     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500134     Document Type: Conference Paper

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