All-optical excitation and detection of microelectrical-mechanical systems

Applied Physics Letters

Volumn 81, Issue 19, 2002, Pages 3531-3533

  Graebner, J E ^a   Pau, S ^a   Gammel, P L ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALL-OPTICAL; ANGULAR MOTIONS; ANGULAR OSCILLATIONS; EXPERIMENTAL ERRORS; MEMSDEVICES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MODE DISTRIBUTION; OPTICAL BEAMS; RADIATION PRESSURE; SCANNING INTERFEROMETERS; SPRING CONSTANTS; THEORETICAL VALUES;

ELECTROSTATIC DEVICES; NATURAL FREQUENCIES; PHOTOEXCITATION; PRESSURE;

FIBER OPTIC NETWORKS;

EID: 79956038348     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1519351     Document Type: Article

References (7)

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5. R. C. Gauthier, R. Niall Tait, H. Mende, and C. Pawlowicz, Appl. Opt. 40, 930 (2001). apo APOPAI 0003-6935
6. J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, Appl. Phys. Lett. 78, 159 (2001). apl APPLAB 0003-6951
7. T. S. J. Lammerink, M. Elwenspoek, and J. H. J. Fluitman, Proceedings of the IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January - 2 February 1991 (IEEE, New York, 1991), pp. 160-165.