Structuring of membrane sensors using sacrificial porous silicon

Sensors and Actuators, A: Physical

Volumn 84, Issue 3, 2000, Pages 315-323

  Hedrich, F ^a   Billat, S ^a   Lang, W ^a  

^a Hahn Schickard Gesellschaft   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROMACHINING; POROUS SILICON; SUBSTRATES; TRANSDUCERS;

MEMBRANE SENSORS; SACRIFICIAL POROUS SILICON LAYERS; THERMAL TRANSDUCERS;

SILICON SENSORS;

EID: 0034274248     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00308-3     Document Type: Article

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