Strongly buckled square micromachined membranes

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 423-432

  Ziebart, Volker ^a   Paul, Oliver ^b   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIFURCATION (MATHEMATICS); BUCKLING; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POISSON RATIO; SILICON NITRIDE; STRAIN;

BUCKLED SQUARE MEMBRANES; RITZ METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 0033328039     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809057     Document Type: Article

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