New test methodology for static and dynamic shape measurements of microelectromechanical systems

Optical Engineering

Volumn 39, Issue 1, 2000, Pages 127-136

  Brown, Gordon C ^a   Pryputniewicz, Ryszard J ^a  

^a Worcester Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTOELECTRONICS; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES;

OPTOELECTRONIC LASER INTERFEROMETRIC MICROSCOPE (OLIM) METHODOLOGY;

MICROSCOPES;

EID: 0033894371     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602353     Document Type: Article

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