In-plane optical measurement of vibrations of MEMS: Gradient methods using interferometry and image processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 161-168

  Cretin, B ^a   Serio, B ^a   Vairac, P ^a  

^a CNRS   (France)

Author keywords

Camera; Image processing; In plane vibration; Interferometer; MEMS; MOEMS; Optical probe; Vibrometer

Indexed keywords

AMPLITUDE MODULATION; DIGITAL IMAGE STORAGE; IMAGE PROCESSING; LASER BEAMS; MICROCOMPUTERS; MICROELECTROMECHANICAL DEVICES; VIBRATION MEASUREMENT; VIBRATIONS (MECHANICAL); VIDEO CAMERAS;

IN-PLANE VIBRATION; OPTICAL PROBE; VIBROMETER;

INTERFEROMETERS;

EID: 1342267174     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500078     Document Type: Conference Paper

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