Nanofabrication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages

  Marrian, Christie R K ^a   Tennant, Donald M ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b New Jersey Nanotechnology Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DNA; ELECTRON BEAM LITHOGRAPHY; MOS CAPACITORS; SELF ASSEMBLY; COMPUTER SIMULATION; ELECTRON SCATTERING; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; POLYMETHYL METHACRYLATES; PROBES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE;

PATTERN FORMATION; DIRECTED ASSEMBLY; IMPRINT LITHOGRAPHY; NANODEVICES; PROXIMAL PROBES;

NANOTECHNOLOGY;

EID: 0142058275     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1600446     Document Type: Conference Paper

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