Process optimization for production of sub-20 nm soft x-ray zone plates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2872-2876

  Spector, S J ^a,b   Jacobsen, C J ^a   Tennant, D M ^b  

^a STONY BROOK UNIVERSITY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001129090     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589747     Document Type: Article

References (17)

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