Modeling of electron elastic and inelastic scattering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3864-3869

  Marrian, C R K ^a   Perkins, F K ^a   Park, D ^a   Dobisz, E A ^a   Peckerar, M C ^a   Rhee, K W ^b   Bass, R ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; GOLD; MATHEMATICAL MODELS; METALLIC FILMS; MONTE CARLO METHODS; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; SCHOTTKY BARRIER DIODES; THIN FILMS; THREE DIMENSIONAL;

ELECTRON SOLID SCATTERING; ELECTRON TRANSMISSION; PROXIMITY EFFECTS; SPREAD FUNCTIONS;

ELECTRON SCATTERING;

EID: 0030283962     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588683     Document Type: Article

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