Application of interferometric broadband imaging alignment on an experimental x-ray stepper

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3631-3636

  Moon, Euclid E ^a   Lee, Jawoong ^a   Everett, Patrick N ^a,b   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Patrick N Everett Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000982198     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590317     Document Type: Article

References (5)

1. E. E. Moon, P. N. Everett, and H. I. Smith, J. Vac. Sci. Technol. B 13, 2648 (1995).
2. E. E. Moon, P. N. Everett, K. Rhee, and H. I. Smith, J. Vac. Sci. Technol. B 14, 3969 (1996).
3. Queensgate Instruments, Ltd., Ascot, Berks, UK.
4. National Instruments, Inc., Austin TX.
5. Moritex USA, Inc., San Diego, CA.