Metal-nanocarbon contacts

Semiconductor Science and Technology

Volumn 29, Issue 5, 2014, Pages

  Wilhite, Patrick ^a   Vyas, Anshul A ^a   Tan, Jason ^a   Tan, Jasper ^a   Yamada, Toshishige ^a,c   Wang, Phillip ^b   Park, Jeongwon ^b   Yang, Cary Y ^a  

^a Department of Computer Science and Engineering   (United States)

^b APPLIED MATERIALS INC   (United States)

^c University of California Santa Cruz   (United States)

Author keywords

contact; interface; metal; nanotube; resistance

Indexed keywords

CARBON NANOTUBES; CONTACT RESISTANCE; CONTACTS (FLUID MECHANICS); ELECTRIC RESISTANCE; INTERFACES (MATERIALS); NANOTUBES;

COMPLEX MECHANISMS; CONTINUOUS IMPROVEMENTS; ELECTRICAL CHARACTERISTIC; HIGH RESOLUTION IMAGE; ON CHIP INTERCONNECT; PERFORMANCE CHARACTERISTICS; RESISTANCE REDUCTION; VERTICALLY ALIGNED;

METALS;

EID: 84898994162     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/29/5/054006     Document Type: Article

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