메뉴 건너뛰기




Volumn 7, Issue 4, 2013, Pages 3661-3667

Reducing contact resistance in graphene devices through contact area patterning

Author keywords

contact; contact patterning; graphene transistor; resistance

Indexed keywords

CARRIER INJECTION; FABRICATED DEVICE; GRAPHENE DEVICES; GRAPHENE SHEETS; GRAPHENE TRANSISTORS; PROCESSING STEPS; SIMPLE APPROACH; TWO-TERMINAL DEVICES;

EID: 84876563699     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn400671z     Document Type: Article
Times cited : (203)

References (45)
  • 1
    • 47749150628 scopus 로고    scopus 로고
    • Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene
    • Lee, C.; Wei, X.; Kysar, J. W.; Hone, J. Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene Science 2008, 321, 385-388
    • (2008) Science , vol.321 , pp. 385-388
    • Lee, C.1    Wei, X.2    Kysar, J.W.3    Hone, J.4
  • 2
    • 57349090160 scopus 로고    scopus 로고
    • Current Saturation in Zero-Bandgap, Top-Gated Graphene Field-Effect Transistors
    • Meric, I.; Han, M. Y.; Young, A. F.; Ozyilmaz, B.; Kim, P.; Shepard, K. L. Current Saturation in Zero-Bandgap, Top-Gated Graphene Field-Effect Transistors Nat. Nanotechnol. 2008, 3, 654-659
    • (2008) Nat. Nanotechnol. , vol.3 , pp. 654-659
    • Meric, I.1    Han, M.Y.2    Young, A.F.3    Ozyilmaz, B.4    Kim, P.5    Shepard, K.L.6
  • 6
    • 49449091072 scopus 로고    scopus 로고
    • Approaching Ballistic Transport in Suspended Graphene
    • Du, X.; Skachko, I.; Barker, A.; Andrei, E. Y. Approaching Ballistic Transport in Suspended Graphene Nat. Nanotechnol. 2008, 3, 491-495
    • (2008) Nat. Nanotechnol. , vol.3 , pp. 491-495
    • Du, X.1    Skachko, I.2    Barker, A.3    Andrei, E.Y.4
  • 11
  • 12
    • 69549088334 scopus 로고    scopus 로고
    • Carbon Nanomaterials for Next-Generation Interconnects and Passives: Physics, Status, and Prospects
    • Li, H.; Xu, C.; Srivastava, N.; Banerjee, K. Carbon Nanomaterials for Next-Generation Interconnects and Passives: Physics, Status, and Prospects IEEE Trans. Electron Devices 2009, 56, 1799-1821
    • (2009) IEEE Trans. Electron Devices , vol.56 , pp. 1799-1821
    • Li, H.1    Xu, C.2    Srivastava, N.3    Banerjee, K.4
  • 13
    • 77956434425 scopus 로고    scopus 로고
    • High-Performance Flexible Graphene Field Effect Transistors with Ion Gel Gate Dielectrics
    • Kim, B. J.; Jang, H.; Lee, S.-K.; Hong, B. H.; Ahn, J.-H.; Cho, J. H. High-Performance Flexible Graphene Field Effect Transistors with Ion Gel Gate Dielectrics Nano Lett. 2010, 10, 3464-3466
    • (2010) Nano Lett. , vol.10 , pp. 3464-3466
    • Kim, B.J.1    Jang, H.2    Lee, S.-K.3    Hong, B.H.4    Ahn, J.-H.5    Cho, J.H.6
  • 14
    • 80053561714 scopus 로고    scopus 로고
    • Graphene Transistors on Mechanically Flexible Polyimide Incorporating Atomic-Layer-Deposited Gate Dielectric
    • Nayfeh, O. M. Graphene Transistors on Mechanically Flexible Polyimide Incorporating Atomic-Layer-Deposited Gate Dielectric IEEE Electron Device Lett. 2011, 32, 1349-1351
    • (2011) IEEE Electron Device Lett. , vol.32 , pp. 1349-1351
    • Nayfeh, O.M.1
  • 15
    • 77952911108 scopus 로고    scopus 로고
    • Continuous, Highly Flexible, and Transparent Graphene Films by Chemical Vapor Deposition for Organic Photovoltaics
    • Gomez De Arco, L.; Zhang, Y.; Schlenker, C. W.; Ryu, K.; Thompson, M. E.; Zhou, C. Continuous, Highly Flexible, and Transparent Graphene Films by Chemical Vapor Deposition for Organic Photovoltaics ACS Nano 2010, 4, 2865-2873
    • (2010) ACS Nano , vol.4 , pp. 2865-2873
    • Gomez De Arco, L.1    Zhang, Y.2    Schlenker, C.W.3    Ryu, K.4    Thompson, M.E.5    Zhou, C.6
  • 16
    • 77952329312 scopus 로고    scopus 로고
    • Metal/Graphene Contact as a Performance Killer of Ultra-High Mobility Graphene -Analysis of Intrinsic Mobility and Contact Resistance
    • Nagashio, K.; Nishimura, T.; Kita, K.; Toriumi, A. Metal/Graphene Contact as a Performance Killer of Ultra-High Mobility Graphene-Analysis of Intrinsic Mobility and Contact Resistance IEDM Tech. Dig. 2009, 565-568
    • (2009) IEDM Tech. Dig. , pp. 565-568
    • Nagashio, K.1    Nishimura, T.2    Kita, K.3    Toriumi, A.4
  • 17
    • 61949103831 scopus 로고    scopus 로고
    • Contact Resistance and Shot Noise in Graphene Transistors
    • Cayssol, J.; Huard, B.; Goldhaber-Gordon, D. Contact Resistance and Shot Noise in Graphene Transistors Phys. Rev. B 2009, 79, 075428-1-6
    • (2009) Phys. Rev. B , vol.79 , pp. 0754281-0754286
    • Cayssol, J.1    Huard, B.2    Goldhaber-Gordon, D.3
  • 18
  • 19
    • 51749110481 scopus 로고    scopus 로고
    • Evidence of the Role of Contacts on the Observed Electron-Hole Asymmetry in Graphene
    • Huard, B.; Stander, N.; Sulpizio, J.; Goldhaber-Gordon, D. Evidence of the Role of Contacts on the Observed Electron-Hole Asymmetry in Graphene Phys. Rev. B 2008, 78, 121402-1-4
    • (2008) Phys. Rev. B , vol.78 , pp. 1214021-1214024
    • Huard, B.1    Stander, N.2    Sulpizio, J.3    Goldhaber-Gordon, D.4
  • 21
    • 79960678123 scopus 로고    scopus 로고
    • Density-of-States Limited Contact Resistance in Graphene Field-Effect Transistors
    • Nagashio, K.; Toriumi, A. Density-of-States Limited Contact Resistance in Graphene Field-Effect Transistors Jpn. J. Appl. Phys. 2011, 50, 070108-1-6
    • (2011) Jpn. J. Appl. Phys. , vol.50 , pp. 0701081-0701086
    • Nagashio, K.1    Toriumi, A.2
  • 25
    • 75749109747 scopus 로고    scopus 로고
    • Contact Resistance in Few and Multilayer Graphene Devices
    • Venugopal, A.; Colombo, L.; Vogel, E. M. Contact Resistance in Few and Multilayer Graphene Devices Appl. Phys. Lett. 2010, 96, 013512-1-3
    • (2010) Appl. Phys. Lett. , vol.96 , pp. 0135121-0135123
    • Venugopal, A.1    Colombo, L.2    Vogel, E.M.3
  • 26
    • 84876587962 scopus 로고    scopus 로고
    • The National Technology Roadmap for Semiconductors, Semiconductor Industry Association.
    • The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, 2010.
    • (2010)
  • 29
    • 77958004238 scopus 로고    scopus 로고
    • Contact Resistance for "end-Contacted" Metal-Graphene and Metal-Nanotube Interfaces from Quantum Mechanics
    • Matsuda, Y.; Deng, W.-Q.; Goddard, W., III. Contact Resistance for "End-Contacted" Metal-Graphene and Metal-Nanotube Interfaces from Quantum Mechanics J. Phys. Chem. C 2010, 114, 17845-17850
    • (2010) J. Phys. Chem. C , vol.114 , pp. 17845-17850
    • Matsuda, Y.1    Deng, W.-Q.2    Iii., G.W.3
  • 32
    • 84871307235 scopus 로고    scopus 로고
    • Rapid Thermal Annealing of Graphene-Metal Contact
    • Balci, O.; Kocabas, C. Rapid Thermal Annealing of Graphene-Metal Contact Appl. Phys. Lett. 2012, 101, 243105-1-5
    • (2012) Appl. Phys. Lett. , vol.101 , pp. 2431051-2431055
    • Balci, O.1    Kocabas, C.2
  • 33
    • 80054683937 scopus 로고    scopus 로고
    • Vacuum-Annealed Cu Contacts for Graphene Electronics
    • Malec, C. E.; Elkus, B.; Davidović, D. Vacuum-Annealed Cu Contacts for Graphene Electronics Solid State Commun. 2011, 151, 1791-1793
    • (2011) Solid State Commun. , vol.151 , pp. 1791-1793
    • Malec, C.E.1    Elkus, B.2    Davidović, D.3
  • 35
    • 80054992490 scopus 로고    scopus 로고
    • Plasma Treatments to Improve Metal Contacts in Graphene Field Effect Transistor
    • Choi, M. S.; Lee, S. H.; Yoo, W. J. Plasma Treatments to Improve Metal Contacts in Graphene Field Effect Transistor J. Appl. Phys. 2011, 110, 073305-1-6
    • (2011) J. Appl. Phys. , vol.110 , pp. 0733051-0733056
    • Choi, M.S.1    Lee, S.H.2    Yoo, W.J.3
  • 37
    • 84874070857 scopus 로고    scopus 로고
    • Electrical Transport across Metal/Two-Dimensional Carbon Junctions: Edge versus Side Contacts
    • Wu, Y.; Wang, Y.; Wang, J.; Zhou, M.; Zhang, A.; Zhang, C.; Yang, Y.; Hua, Y.; Xu, B. Electrical Transport across Metal/Two-Dimensional Carbon Junctions: Edge versus Side Contacts AIP Adv. 2012, 2, 012132-1-12
    • (2012) AIP Adv. , vol.2 , pp. 0121321-01213212
    • Wu, Y.1    Wang, Y.2    Wang, J.3    Zhou, M.4    Zhang, A.5    Zhang, C.6    Yang, Y.7    Hua, Y.8    Xu, B.9
  • 38
    • 34547334459 scopus 로고    scopus 로고
    • Energy Band-Gap Engineering of Graphene Nanoribbons
    • Han, M.; Özyilmaz, B.; Zhang, Y.; Kim, P. Energy Band-Gap Engineering of Graphene Nanoribbons Phys. Rev. Lett. 2007, 98, 206805-1-4
    • (2007) Phys. Rev. Lett. , vol.98 , pp. 2068051-2068054
    • Han, M.1    Özyilmaz, B.2    Zhang, Y.3    Kim, P.4
  • 39
    • 0001672081 scopus 로고
    • Models for Contacts to Planar Devices
    • Berger, H. H. Models for Contacts to Planar Devices Solid-State Electron. 1972, 15, 145-158
    • (1972) Solid-State Electron. , vol.15 , pp. 145-158
    • Berger, H.H.1
  • 40
    • 68949135389 scopus 로고    scopus 로고
    • Screening and Interlayer Coupling in Multilayer Graphene Field-Effect Transistors
    • Sui, Y.; Appenzeller, J. Screening and Interlayer Coupling in Multilayer Graphene Field-Effect Transistors Nano Lett. 2009, 9, 2973-2977
    • (2009) Nano Lett. , vol.9 , pp. 2973-2977
    • Sui, Y.1    Appenzeller, J.2
  • 41
    • 84876521945 scopus 로고    scopus 로고
    • Extended abstract book, Graphene Conference: From Research to Applications, 15-16 October 2012, National Physical Laboratory Teddington, Middlesex, UK. http://www.npl.co.uk/science-technology/quantum-detection/news- events/graphene-conference-2012/graphene-conference-2012-agenda/.
    • Dimitrakopoulos, C.; Liu, G.; McArdle, T. J.; Grill, A.; Smith, J. T.; Farmer, D. B.; Avouris, P.; Pfeiffer, D. Wafer-Scale Epitaxial Graphene and Graphene Nanoribbon Arrays on SiC. Extended abstract book, Graphene Conference: From Research to Applications, 15-16 October 2012, National Physical Laboratory Teddington, Middlesex, UK. http://www.npl.co.uk/science-technology/quantum- detection/news-events/graphene-conference-2012/graphene-conference-2012-agenda/.
    • Wafer-Scale Epitaxial Graphene and Graphene Nanoribbon Arrays on SiC
    • Dimitrakopoulos, C.1    Liu, G.2    McArdle, T.J.3    Grill, A.4    Smith, J.T.5    Farmer, D.B.6    Avouris, P.7    Pfeiffer, D.8
  • 44
    • 79958862767 scopus 로고    scopus 로고
    • Effect of Sic Wafer Miscut Angle on the Morphology and Hall Mobility of Epitaxially Grown Graphene
    • Dimitrakopoulos, C.; Grill, A.; McArdle, T. J.; Liu, Z.; Wisnieff, R.; Antoniadis, D. A. Effect of Sic Wafer Miscut Angle on the Morphology and Hall Mobility of Epitaxially Grown Graphene Appl. Phys. Lett. 2011, 98, 222105-1-3
    • (2011) Appl. Phys. Lett. , vol.98 , pp. 2221051-2221053
    • Dimitrakopoulos, C.1    Grill, A.2    McArdle, T.J.3    Liu, Z.4    Wisnieff, R.5    Antoniadis, D.A.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.