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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1626-1628

Electrical properties of carbon nanotube bundles for future via interconnects

(6) Nihei, Mizuhisa a Kawabata, Akio a Kondo, Daiyu a Horibe, Masahiro a Sato, Shintaro a Awano, Yuji a

a FUJITSU LABORATORIES LTD (Japan)

Author keywords

Carbon nanotube; Chemical vapor deposition; Interconnect; Resistance; Via

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; DRY ETCHING; ELECTRIC POWER SYSTEM INTERCONNECTION; ELECTRIC RESISTANCE; FIELD EFFECT TRANSISTORS; OHMIC CONTACTS; PHOTOLITHOGRAPHY; PHOTORESISTORS; THERMAL CONDUCTIVITY; TRANSMISSION ELECTRON MICROSCOPY;

CONTACT LAYER; NANOCLUSTERS; SINGLE WALL CARBON NANOTUBES (SWN); VIA;

CARBON NANOTUBES;

EID: 21244470717 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.1626 Document Type: Article

Times cited : (167)

References (12)

1
- 0342819025
- S. Iijima: Nature 354 (1991) 56.
- (1991) Nature , vol.354 , pp. 56
- Iijima, S.¹

2
- 17944383013
- Z. Yao, C. L. Kane and C. Dekker: Phys. Rev. Lett. 84 (2000) 2941.
- (2000) Phys. Rev. Lett. , vol.84 , pp. 2941
- Yao, Z.¹ Kane, C.L.² Dekker, C.³

3
- 0033138023
- J. Hone, M. Whitney and A. Zettle: Synth. Met. 103 (1999) 2498.
- (1999) Synth. Met. , vol.103 , pp. 2498
- Hone, J.¹ Whitney, M.² Zettle, A.³

4
- 39249085918
- J. Kong, E. Yenilmez, T. W. Tombler, W. Kim and H. Dai: Phys. Rev. Lett. 87 (2001) 106801.
- (2001) Phys. Rev. Lett. , vol.87 , pp. 106801
- Kong, J.¹ Yenilmez, E.² Tombler, T.W.³ Kim, W.⁴ Dai, H.⁵

5
- 21244459919
- W. Hoenlein: Proc. International Microprocesses & Nanotechnology Conf., 2001, p. 76.
- (2001) Proc. International Microprocesses & Nanotechnology Conf. , pp. 76
- Hoenlein, W.¹

6
- 84944039551
- J. Li, Q. Ye, A. Cassell, J. Koehne, H. T. Hg, J. Han and M. Meyyappan: Proc. Int. Interconnect Technol. Conf., 2003, p. 271.
- (2003) Proc. Int. Interconnect Technol. Conf. , pp. 271
- Li, J.¹ Ye, Q.² Cassell, A.³ Koehne, J.⁴ Hg, H.T.⁵ Han, J.⁶ Meyyappan, M.⁷

7
- 0042866046
- M. Nihei, A. Kawabata and Y. Awano: Jpn. J. Appl. Phys. 42 (2003) L721.
- (2003) Jpn. J. Appl. Phys. , vol.42
- Nihei, M.¹ Kawabata, A.² Awano, Y.³

8
- 8644228615
- M. Nihei, M. Horibe, A. Kawabata and Y. Awano: Proc. Int. Interconnect Technol. Conf., 2004, p. 251.
- (2004) Proc. Int. Interconnect Technol. Conf. , pp. 251
- Nihei, M.¹ Horibe, M.² Kawabata, A.³ Awano, Y.⁴

9
- 21244462302
- Y. Awano, M. Nihei, S. Sato, A. Kawabata, D. Kondo, M. Ohfuti and N. Yokoyama: Proc. Int. Conf. Solid State Devices and Materials, 2004, p. 40.
- (2004) Proc. Int. Conf. Solid State Devices and Materials , pp. 40
- Awano, Y.¹ Nihei, M.² Sato, S.³ Kawabata, A.⁴ Kondo, D.⁵ Ohfuti, M.⁶ Yokoyama, N.⁷

10
- 3142647341
- M. Nihei, A. Kawabata and Y. Awano: Jpn. J. Appl. Phys. 43 (2004) 1856.
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 1856
- Nihei, M.¹ Kawabata, A.² Awano, Y.³

11
- 21244432313
- A. Kawabata, M. Horibe, D. Kondo, M. Nihei and Y. Awano: Proc. Int. Conf. Science and Application of Nanotubes, 2004, p. 31.
- (2004) Proc. Int. Conf. Science and Application of Nanotubes , pp. 31
- Kawabata, A.¹ Horibe, M.² Kondo, D.³ Nihei, M.⁴ Awano, Y.⁵

12
- 0344862047
- S. Sato, A. Kawabata, M. Nihei and Y. Awano: Chem. Phys. Lett. 382 (2003) 361.
- (2003) Chem. Phys. Lett. , vol.382 , pp. 361
- Sato, S.¹ Kawabata, A.² Nihei, M.³ Awano, Y.⁴

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