Superconformal Film Growth

Electrocrystallization in Nanotechnology

Volumn , Issue , 2007, Pages 96-114

  Moffat, Thomas P ^a   Wheeler, Daniel ^a   Josell, Daniel ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Competitive adsorption; Electrocrystallization; Feature filling; Metal deposition kinetics; Nanotechnology; Shape change simulations; Stability analysis; Superconformal film growth

Indexed keywords

EID: 84890267007     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527610198.ch5     Document Type: Chapter

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