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Volumn 153, Issue 2, 2006, Pages

Curvature enhanced adsorbate coverage model for electrodeposition

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; ADSORPTION; ELECTROCHEMISTRY; ELECTROLYTES; FILM GROWTH; POLYETHYLENE GLYCOLS;

EID: 30644480323     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2165580     Document Type: Article
Times cited : (138)

References (49)
  • 2
    • 30644457401 scopus 로고    scopus 로고
    • A. J.McKerrow, Y.Shacham-Diamand, S.Zaima, and T.Ohba, Editors, MRS, Warrendale, PA
    • Q.-T. Jiang, A. Frank, B. Carpenter, R. Carpio, T. Ritzdorf, R. A. Auger, K. Pfeifer, and J. D. Luttmer, in Proceedings of Advanced Metallization Conference 2000, A. J. McKerrow, Y. Shacham-Diamand, S. Zaima, and, T. Ohba, Editors, MRS, Warrendale, PA (2001); A. Frank, Q. T. Jiang, L. Chen, B. Carpenter, R. Carpio, T. Ritzdorf, and K. Pfeifer, in Proceedings of Advanced Metallization Conference, 2000, D. Edelstein, G. Dixit, Y. Yasuda, and, T. Ohba, Editors, p. 181, MRS, Warrendale, PA (2000).
    • (2001) Proceedings of Advanced Metallization Conference 2000
    • Jiang, Q.-T.1    Frank, A.2    Carpenter, B.3    Carpio, R.4    Ritzdorf, T.5    Auger, R.A.6    Pfeifer, K.7    Luttmer, J.D.8
  • 3
    • 0034460887 scopus 로고    scopus 로고
    • D.Edelstein, G.Dixit, Y.Yasuda, and T.Ohba, Editors, p. MRS, Warrendale, PA (2000)
    • Q.-T. Jiang, A. Frank, B. Carpenter, R. Carpio, T. Ritzdorf, R. A. Auger, K. Pfeifer, and J. D. Luttmer, in Proceedings of Advanced Metallization Conference 2000, A. J. McKerrow, Y. Shacham-Diamand, S. Zaima, and, T. Ohba, Editors, MRS, Warrendale, PA (2001); A. Frank, Q. T. Jiang, L. Chen, B. Carpenter, R. Carpio, T. Ritzdorf, and K. Pfeifer, in Proceedings of Advanced Metallization Conference, 2000, D. Edelstein, G. Dixit, Y. Yasuda, and, T. Ohba, Editors, p. 181, MRS, Warrendale, PA (2000).
    • (2000) Proceedings of Advanced Metallization Conference , pp. 181
    • Frank, A.1    Jiang, Q.T.2    Chen, L.3    Carpenter, B.4    Carpio, R.5    Ritzdorf, T.6    Pfeifer, K.7
  • 7
    • 30644477175 scopus 로고    scopus 로고
    • H.Deligianni, S. T.Mayer, T. P.Moffat, and G. R.Stafford, Editors, PV 2004-17, p. The Electrochemical Society Proceedings Series, Pennington, NJ
    • J. Reid, E. Webb, J. Sukamto, Y. Takada, and T. Archer, in Electrochemical Processing in ULSI and MEMS, H. Deligianni, S. T. Mayer, T. P. Moffat, and, G. R. Stafford, Editors, PV 2004-17, p. 184, The Electrochemical Society Proceedings Series, Pennington, NJ (2005).
    • (2005) Electrochemical Processing in ULSI and MEMS , pp. 184
    • Reid, J.1    Webb, E.2    Sukamto, J.3    Takada, Y.4    Archer, T.5
  • 8
    • 33750124012 scopus 로고    scopus 로고
    • H.Deligianni, S. T.Mayer, T. P.Moffat, and G. R.Stafford, Editors, PV 2004-17, p. The Electrochemical Society Proccedings Series, Pennington, NJ
    • C. Witt, J. Srinivasan, and R. Carpio, in Electrochemical Processing in ULSI and MEMS, H. Deligianni, S. T. Mayer, T. P. Moffat, and, G. R. Stafford, Editors, PV 2004-17, p. 57, The Electrochemical Society Proccedings Series, Pennington, NJ (2005).
    • (2005) Electrochemical Processing in ULSI and MEMS , pp. 57
    • Witt, C.1    Srinivasan, J.2    Carpio, R.3
  • 18
    • 0000363887 scopus 로고    scopus 로고
    • 0013-4651 10.1149/1.1377898
    • Y. Cao, P. Taephaisitphongse, R. Chalupa, and A. West, J. Electrochem. Soc. 0013-4651 10.1149/1.1377898, 148, C466 (2001); P. Taephaisitphongse, Y. Cao, and A. C. West, J. Electrochem. Soc., 148, C492 (2001).
    • (2001) J. Electrochem. Soc. , vol.148 , pp. 466
    • Cao, Y.1    Taephaisitphongse, P.2    Chalupa, R.3    West, A.4
  • 19
    • 0001310173 scopus 로고    scopus 로고
    • Y. Cao, P. Taephaisitphongse, R. Chalupa, and A. West, J. Electrochem. Soc. 0013-4651 10.1149/1.1377898, 148, C466 (2001); P. Taephaisitphongse, Y. Cao, and A. C. West, J. Electrochem. Soc., 148, C492 (2001).
    • (2001) J. Electrochem. Soc. , vol.148 , pp. 492
    • Taephaisitphongse, P.1    Cao, Y.2    West, A.C.3


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