Superconformal silver deposition using KSeCN derivatized substrates

Electrochemical and Solid-State Letters

Volumn 6, Issue 5, 2003, Pages

  Baker, B C ^a   Witt, C ^b   Wheeler, D ^a   Josell, D ^a   Moffat, T P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CATALYSTS; COMPOSITION EFFECTS; DERIVATIVES; ELECTRODEPOSITION; ELECTROLYTES; POTASSIUM COMPOUNDS;

DEPOSITION RATE; SILVER-CYANIDE ELECTROLYTES; SUBMICROMETER TRENCHES; SUPERCONFORMAL DEPOSITION;

SILVER;

EID: 0038035334     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1561280     Document Type: Article

References (6)

1. T. P. Moffat, B. Baker, D. Wheeler, J. E. Bonevich, M. Edelstein, D. R. Kelly, L. Gan, G. R. Stafford, P. J. Chen, W. F. Egelhoff, and D. Josell, J. Electrochem. Soc, 149, C423 (2002).
2. D. Josell, B. Baker, C. Witt, D. Wheeler, and T. P. Moffat, J. Electrochem. Soc., 149, C637 (2002).
3. B. C. Baker, M. Freeman, B. Melnick, D. Wheeler, D. Josell, and T. P. Moffat, J. Electrochem. Soc., 150, C61 (2003).
4. T. P. Moffat, D. Wheeler, W. H. Huber, and D. Josell, Electrochem. Solid-State Lett., 4, C26 (2001).
5. D. Josell, D. Wheeler, W. H. Huber, and T. P. Moffat, Phys. Rev. Lett., 87, 016102 (2001).
6. T. P. Moffat, D. Wheeler, C. Witt, and D. Josell, Electrochem. Solid-State Lett., 5, C110 (2002).