A Simple Equation for Predicting Superconformal Electrodeposition in Submicrometer Trenches

Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

  Josell, D ^a   Wheeler, D ^a   Huber, W H ^a   Bonevich, J E ^a   Moffat, T P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001324954     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1414287     Document Type: Article

References (10)

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10. D. Wheeler, D. Josell, and T. Moffat, J. Comput. Phys., Submitted.