Electrochemical and Fill Studies of a Multicomponent Additive Package for Copper Deposition

Journal of the Electrochemical Society

Volumn 148, Issue 7, 2001, Pages

  Taephaisitphongse, Premratn ^a   Cao, Yang ^a,b   West, Alan C ^a,b  

^a Fu Foundation School of Engineering and Applied Science   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001310173     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1376636     Document Type: Article

References (19)

1. J. J. Kelly, C. Tian, and A. C. West, J. Electrochem. Soc., 146, 2540 (1999).
2. J. J. Kelly and A. C. West, Electrochem Solid-State Lett., 2, 561 (1999).
3. H-G. Creutz, R. M. Stevenson, and E. A. Romanowski, U.S. Pat. 3,267,010 (1966); H-G. Creutz, R. M. Stevenson, and E. A. Romanowski, U.S. Pat. 3, 288, 690 (1966).
4. H-G. Creutz, R. M. Stevenson, and E. A. Romanowski, U.S. Pat. 3,267,010 (1966); H-G. Creutz, R. M. Stevenson, and E. A. Romanowski, U.S. Pat. 3, 288, 690 (1966).
5. T. Taylor, T. Ritzdorf, H. Lindberg, B. Carpenter, and M. LeFebvre, Solid State Technol., 1998, 47 (Nov).
6. Y. Cao, P. Taephaisitphongse, and A. C. West, J. Electrochem. Soc., 148, C466 (2001).
7. D. Tench and C. Ogden, J. Electrochem. Soc., 125, 194 (1978).
8. R. Haak, C. Ogden, and D. Tench, Plat. Surf. Finish., 68, 52 (April 1981).
9. R. Haak, C. Ogden, and D. Tench, Plat. Surf. Finish., 69, 62 (March 1982).
10. W. O. Freitag and M. R. Manning, in Proceedings of the Annual Technical Conference, American Electroplater's Society, Vol. 10, p. 270, June 27-30, 1983.
11. J. J. Kelly and A. C. West, J. Electrochem. Soc., 145, 3472 (1998).
12. A. C. West, J. Electrochem. Soc., 147, 227 (2000).
13. T. P. Moffat, J. E. Bonevich, W. H. Huber, A. Stanishevsky, D. R. Kelly, G. R. Stafford, and D. Josell, J. Electrochem. Soc., 147, 4524 (2000).
14. J. Reid and S. Mayer, in Proceedings of the Advanced Metallization Conference 1999, p. 53, Materials Research Society, Sept 28-30, 2000.
15. T. Ritzdorf, D. Fulton, and L. Chen, in Proceedings of the Advanced Metallization Conference 1999, p. 101, Materials Research Society, Sept 28-30, 2000.
16. E. Richard, I. Vervoort, S. H. Brongersma, H. Bender, O. Beyer, R. Palmans, S. Lagrange, and K. Maex, in Proceedings of the Advanced Metallization Conference 1999, p. 59, Materials Research Society, Sept 28-30, 2000.
17. K. G. Jordan and C. W. Tobias, J. Electrochem. Soc., 138, 1251 (1991).
18. C. Madore, M. Matlosz, and D. Landolt, J. Electrochem. Soc., 143, 3927 (1996); C. Madore, M. Matlosz, and D. Landolt, J. Electrochem. Soc., 143, 3936 (1996).
19. C. Madore, M. Matlosz, and D. Landolt, J. Electrochem. Soc., 143, 3927 (1996); C. Madore, M. Matlosz, and D. Landolt, J. Electrochem. Soc., 143, 3936 (1996).