Superconformal electrodeposition using derivitized substrates

Electrochemical and Solid-State Letters

Volumn 5, Issue 12, 2002, Pages

  Moffat, Thomas P ^a   Wheeler, D ^a   Witt, C ^b   Josell, D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; COPPER; ELECTROLYTES; FILM GROWTH; SUBSTRATES;

DERIVITIZATION;

ELECTROPLATING;

EID: 0036900640     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1521290     Document Type: Article

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