Superconformal electrodeposition in submicron features

Physical Review Letters

Volumn 87, Issue 1, 2001, Pages

  Josell, D ^a   Wheeler, D ^a   Huber, W H ^a   Moffat, T P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CATALYSTS; COMPUTER SIMULATION; CYCLIC VOLTAMMETRY; DIFFUSION; ELECTRODEPOSITION; ELECTROLYTES; FINITE DIFFERENCE METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; REACTION KINETICS; SURFACE PROPERTIES;

SLOW SCAN RATE VOLTAMMETRY; SUPERCONFORMAL ELECTRODEPOSITION;

COPPER;

EID: 35348844395     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.87.016102     Document Type: Article

References (10)

1. P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev., 42, 567 (1998).
2. H. Deligianni, J. O. Dukovic, P. C. Andricacos, and E. G. Walton, in Proceedings of the International Symposium on Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Deposition II, P. C. Andricacos et al.: (Electrochemical Society Inc., Pennington, NJ, 2000), Vol. 99-9, p. 52.
3. A. C. West, J. Electrochem. Soc., 147, 227 (2000).
4. J. Reid and S. Mayer, in Proceedings of the Advanced Metallization Conference, 1999, M. E. Gross, T. Gessner, N. Kobayashi, and Y. Yasuda (MRS, Warrendale, PA, 2000), p. 53.
5. T. Ritzdorf, D. Fulton, and L. Chen, in Proceedings of the Advanced Metallization Conference, 1999 M. E. Gross, T. Gessner, N. Kobayashi, and Y. Yasuda (MRS, Warrendale, PA, 2000), p. 101.
6. E. Richard et al.: in Proceedings of the Advanced Metallization Conference, 1999 M. E. Gross, T. Gessner, N. Kobayashi, and Y. Yasuda (MRS, Warrendale, PA, 2000), p. 149.
7. T. P. Moffat et al.: J. Electrochem. Soc., 147, 4524 (2000).
8. A. J. Bard and L. R. Faulkner, Electrochemical Methods, Fundamental and Applications (Wiley, New York,1980).
9. O. Dannenberger, M. Buck, and M. Grunze, J. Phys. Chem. B, 103, 2202 (1999).
10. L. S. Jung and C. T. Campbell, Phys. Rev. Lett., 84, 5164 (2000).