Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1397-1400

  Mack, B ^a   Kratt, K ^a   Sturmer M ^a   Wallrabe, U ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Converter; Electromagnetic; Energy harvesting; Vibration

Indexed keywords

COIL ARRAYS; ELECTROMAGNETIC ENERGY; ENERGY HARVESTING; MICROCOILS; MICROGENERATORS; PDMS MEMBRANE; POLYDIMETHYLSILOXANE MEMBRANE;

ACTUATORS; ELECTROMAGNETISM; HARVESTING; MAGNETIC MATERIALS; MICROCHANNELS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; POLYCHLORINATED BIPHENYLS; SILICONES;

SOLID-STATE SENSORS;

EID: 71449101263     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285833     Document Type: Conference Paper

References (6)

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2. C. T. Pan & T.T. Wu, "Development of a rotary electromagnetic microgenerator", Journal of Micromechanics and Microengineering, 17 (2007), pp. 120-128.
3. P. D. Mitcheson, E.K. Reilly, T. Toh, P.K. Wright, E.M. Yeatman, "Performance limits of the three MEMS inertial energy generator transduction types", Journal of Micromechanics and Microengineering, 17 (2007), pp. S211-S216.
4. http://www.contag.de, Webpage accessed on August 11, 2008.
5. K. Kratt, M. Seidel, M. Emmenegger, U. Wallrabe, J. G. Korvink, "Solenoidal micro coils manufactured with a wire bonder", Proc. MEMS 2008, Tuscon, USA, January 13-17, 2008, pp. 996-999.
6. V. Badilita, K. Kratt, T. Burger, J. G. Korvink, U. Wallrabe, "3D high aspect ratio, MEMS integrated micro solenoids and Helmholtz micro coils", Digest Tech. Papers Transducers'09 Conference, Denver, USA, June 21-25, 2009, accepted.