3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1106-1109

  Badilita, Vlad ^a   Kratt, K ^a   Burger, T ^a   Korvink, J G ^a   Wallrabe, U ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

3D micro coils; Energy harvesting; Wire bonding

Indexed keywords

CYLINDRICAL POSTS; ENERGY HARVESTING; HELMHOLTZ; HIGH ASPECT RATIO; INDUCED VOLTAGES; INTEGRATED TECHNOLOGIES; LARGE ARRAYS; MEMS INTEGRATED; MICROCOILS; SINUSOIDAL MAGNETIC FIELDS; THEORETICAL CALCULATIONS; WIREBONDER; WIREBONDING;

ACTUATORS; ASPECT RATIO; HARVESTING; MAGNETIC FIELDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SOLENOIDS; THREE DIMENSIONAL; WINDING; WIRE;

SOLID-STATE SENSORS;

EID: 71449101507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285923     Document Type: Conference Paper

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