Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering

IEEE Transactions on Microwave Theory and Techniques

Volumn 61, Issue 1, 2013, Pages 403-414

  Gong, Songbin ^a   Piazza, Gianluca ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

High electromechanical coupling; lamb wave; lithium niobate (LN); piezoelectric resonators; wideband filters

Indexed keywords

CENTER FREQUENCY; DESIGN AND ANALYSIS; KEY PERFORMANCE PARAMETERS; LATERAL VIBRATIONS; LITHIUM-NIOBATE (LN); MICRO RESONATORS; MICROELECTROMECHANICAL SYSTEMS RESONATORS; MULTI FREQUENCY; PIEZOELECTRIC RESONATORS; POWER HANDLING; QUALITY FACTORS; RF FILTERING; RF FRONT END; RF-MEMS; STATIC CAPACITANCE; TEMPERATURE COEFFICIENT OF FREQUENCIES; THEORETICAL PREDICTION; WIDE BAND FILTER; WIDE-BAND;

FILTER BANKS; LITHIUM; MEMS; MICROELECTROMECHANICAL DEVICES; NIOBIUM COMPOUNDS; SURFACE WAVES;

ELECTROMECHANICAL COUPLING;

EID: 84872871511     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2012.2228671     Document Type: Conference Paper

References (46)

1. R. Ruby, P. Bradley, I. Larson, J., Y. Oshmyansky, and D. Figueredo, "Ultra-miniature high-filters and duplexers using FBAR technology," in IEEE Int. Solid-State Circuits Conf. Tech. Dig., 2001, pp. 120-121, 438.
2. Q.-X. Su, P. Kirby, E. Komuro, M. Imura, Q. Zhang, and R. Whatmore, "Thin-film bulk acoustic resonators and filters using ZnO and leadzirconium-titanate thin films," IEEE Trans. Microw. Theory Techn., vol. 49, no. 4, pp. 769-778, Apr. 2001. (Pubitemid 32426378)
3. C. D. Corso, A. Dickherber, and W. D. Hunt, "Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator," J. Appl. Phys., vol. 101, no. 5, pp. 054 514-054 514-7, Mar. 2007.
4. G. Piazza, P. Stephanou, and A. Pisano, "Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators," J. Microelectromech. Syst., vol. 15, no. 6, pp. 1406-1418, Dec. 2006. (Pubitemid 44921759)
5. A. Reinhardt, E. Defay, F. Perruchot, and C. Billard, "Tunable composite piezoelectric resonators: A possible Holy Grail of RF filters," in IEEEMTT-S Int. Microw. Symp. Dig., Jun. 2012, pp. 1-3.
6. M. Pijolat, A. Reinhardt, E. Defay, C. Deguet, D. Mercier, M. Aid, J. Moulet, B. Ghyselen, D. Gachon, and S. Ballandras, "Large Qxf product for HBAR using smart cut transfer of LiNbO3 thin layers onto LiNbO3 substrate," in IEEE Ultrason. Symp., Nov. 2008, pp. 201-204.
7. C. Zuo, J. Van Der Spiegel, and G. Piazza, "1. 05-GHz CMOS oscillator based on lateral-field-excited piezoelectric AlN contour-mode MEMS resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 57, no. 1, pp. 82-87, Jan. 2010.
8. X. Zhu, J. Phillips, and A. Mortazawi, "A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2007, pp. 671-674. (Pubitemid 47486088)
9. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Super-high-frequency two-port AlN contour-mode resonators for RF applications," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 57, no. 1, pp. 38-45, Jan. 2010.
10. T. Kimura, M. Kadota, and Y. Ida, "High Q SAW resonator using upperelectrodes on grooved-electrodes in LiTaO3," in IEEE MTT-S Int. Microw. Symp. Dig., May 2010, pp. 1740-1743.
11. M. Pijolat, S. Loubriat, S. Queste, D. Mercier, A. Reinhardt, E. Defay, C. Deguet, L. Clavelier, H. Moriceau, M. Aid, and S. Ballandras, "Large electromechanical coupling factor film bulk acoustic resonator with-cut LiNbO3 layer transfer," Appl. Phys. Lett., vol. 95, no. 18, pp. 182 106-182 106-3, Nov. 2009.
12. Y.-W. Lin, S.-S. Li, Z. Ren, and C. Nguyen, "Low phase noise arraycomposite micromechanical wine-glass disk oscillator," in IEEE Int. Electron Devices Meeting Tech. Dig., Dec. 2005, pp. 4, 281.
13. S. Gong, L. Shi, and G. Piazza, "High electromechanical coupling MEMS resonators at 530 MHz using ion sliced-cut LiNbO3 thin film," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2012, vol. 1, pp. 1-5.
14. J.-H. Lee, I. Bargatin, J. Provine, F. Liu, M.-K. Seo, R. Maboudian, M. Brongersma, N. Melosh, Z. Shen, and R. Howe, "Effect of illlumination on thermionic emission from microfabricated silicon carbide structures," in 16th Int. Solid-State Sens., Actuators, Microsyst. Conf., Jun. 2011, pp. 2658-2661.
15. N.-K. Kuo, S. Gong, J. Hartman, J. Kelliher, W. Miller, J. Parke, S. Krishaswamy, J. Adam, and G. Piazza, "Micromachined sapphire GHz lateral overtone bulk acoustic resonators transduced by aluminum nitride," in IEEE 25th Int. MEMS Conf., Feb. 2012, pp. 27-30.
16. M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, "Fabrication of single-crystal lithium niobate films by crystal ion slicing," Appl. Phys. Lett., vol. 73, no. 16, pp. 2293-2295, Oct. 1998. (Pubitemid 128673961)
17. R. Abdolvand, H. Lavasani, G. Ho, and F. Ayazi, "Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 55, no. 12, pp. 2596-2606, Dec. 2008.
18. H. Chandrahalim, S. A. Bhave, R. Polcawich, J. Pulskamp, D. Judy, R. Kaul, and M. Dubey, "Performance comparison of pb(zr0. 52ti0. 48)o3-only and pb(zr0. 52ti0. 48)o3-on-silicon resonators," Appl. Phys. Lett., vol. 93, no. 23, pp. 233 504-233 504-3, Dec. 2008.
19. I. Kuznetsova, B. Zaitsev, S. Joshi, and I. Borodina, "Investigation of acoustic waves in thin plates of lithium niobate and lithium tantalate," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 48, no. 1, pp. 322-328, Jan. 2001. (Pubitemid 32191208)
20. S. Gevorgian, T. Martinsson, P. Linner, and E. Kollberg, "CAD models for multilayered substrate interdigital capacitors," IEEE Trans. Microw. Theory Techn., vol. 44, no. 6, pp. 896-904, Jun. 1996. (Pubitemid 126770643)
21. B. A. Auld, Acoustic Fields and Waves in Solids. Melbourne, FL: Krieger, 1990.
22. G. Kovacs, M. Anhorn, H. Engan, G. Visintini, and C. Ruppel, "Improved material constants for LiNbO3 and LiTaO3," in Proc. IEEE Ultrason. Symp., Dec. 1990, vol. 1, pp. 435-438.
23. R. T. Smith and F. S. Welsh, "Temperature dependence of the elastic, piezoelectric, and dielectric constants of lithium tantalate and lithium niobate," J. Appl. Phys., vol. 42, no. 6, pp. 2219-2230, May 1971.
24. H. Ogi, Y. Kawasaki, M. Hirao, and H. Ledbetter, "Acoustic spectroscopy of lithium niobate: Elastic and piezoelectric coefficients," J. Appl. Phys., vol. 92, no. 5, pp. 2451-2456, Sep. 2002.
25. H. Akazawa and M. Shimada, "Correlation between interfacial structure and-axis-orientation of LiNbO3 films grown on Si and SiO2 by electron cyclotron resonance plasma sputtering," J. Crys. Growth, vol. 270, no. 3, pp. 560-567, 2004.
26. S. Tan, T. Gilbert, C. A. Hung, T. E. Schlesinger, and M. Migliuolo, "Sputter deposited c-oriented LiNbO3 thin films on SiO2," J. Appl. Phys., vol. 79, no. 7, pp. 3548-3553, Apr. 1996. (Pubitemid 126571785)
27. M. Kadota, T. Ogami, K. Yamamoto, H. Tochishita, and Y. Negoro, "High-frequency lamb wave device composed of MEMS structure using LiNbO3 thin film and air gap," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 57, no. 11, pp. 2564-2571, Nov. 2010.
28. D. Saulys, V. Joshkin, M. Khoudiakov, T. Kuech, A. Ellis, S. Oktyabrsky, and L. McCaughan, "An examination of the surface decomposition chemistry of lithium niobate precursors under high vacuum conditions," J. Crys. Growth, vol. 217, no. 3, pp. 287-301, 2000.
29. R. Betts and C. Pitt, "Growth of thin-film lithium niobate by molecular beam epitaxy," Electron. Lett., vol. 21, no. 21, pp. 960-962, 1985, 10. (Pubitemid 16474506)
30. L. Arizmendi, "Photonic applications of lithium niobate crystals," Phys. Status Solidi (a), vol. 201, no. 2, pp. 253-283, 2004.
31. G. Poberaj, M. Koechlin, F. Sulser, A. Guarino, J. Hajfler, and P. Gunter, "Ion-sliced lithium niobate thin films for active photonic devices," Opt. Mater., vol. 31, no. 7, pp. 1054-1058, 2009.
32. K. Diest, M. J. Archer, J. A. Dionne, Y.-B. Park, M. J. Czubakowski, and H. A. Atwater, "Silver diffusion bonding and layer transfer of lithium niobate to silicon," Appl. Phys. Lett., vol. 93, no. 9, pp. 092 906-092 906-3, Sep. 2008.
33. M. Solal, T. Pastureaud, S. Ballandras, B. Aspar, B. Biasse, W. Daniau, J. Hode, S. Calisti, and V. Laude, "Oriented lithiumniobate layers transferred on 4100 silicon wafer for RF SAW devices," in Proc. IEEE Ultrason. Symp., Oct. 2002, vol. 1, pp. 131-134.
34. P. Rabiei and W. H. Steier, "Lithium niobate ridge waveguides and modulators fabricated using smart guide," Appl. Phys. Lett., vol. 86, no. 16, pp. 161 115-161 115-3, Apr. 2005.
35. S. Benchabane, L. Robert, J.-Y. Rauch, A. Khelif, and V. Laude, "Highly selective electroplated nickel mask for lithium niobate dry etching," J. Appl. Phys., vol. 105, no. 9, pp. 094 109-094 109-6, May 2009.
36. S. Gong, N.-K. Kuo, and G. Piazza, "GHz high-lateral overmoded bulk acoustic-wave resonators using epitaxial SiC thin film," J. Microelectromech. Syst., vol. 21, no. 2, pp. 253-255, Apr. 2012.
37. M. Giovannini, S. Yazici, N.-K. Kuo, and G. Piazza, "Spurious mode suppression via apodization for 1 GHz AlN contour-mode resonators," in IEEE Int. Freq. Control Symp., May 2012, pp. 1-5.
38. S. Chandorkar, M. Agarwal, R. Melamud, R. Candler, K. Goodson, and T. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," in IEEE 21st Int. MEMS Conf., Jan. 2008, pp. 74-77.
39. L. Sorenson, J. Fu, and F. Ayazi, "One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-silicon micromechanical resonators," in 16th In. Solid-State Sens., Actuators, Microsyst. Conf., Jun. 2011, pp. 918-921.
40. L.-W. Hung and C.-C. Nguyen, "Capacitive-piezoelectric AlN resonators with 12, 000," in IEEE 24th Int. MEMS Conf., Jan. 2011, pp. 173-176.
41. W. Wang and D. Weinstein, "Acoustic bragg reflectors for Qenhancement of unreleased MEMS resonators," in Joint IEEE Int. Freq. Control Conf./Eur. Freq. and Time Forum, May 2011, pp. 1-6.
42. T. Gischkat, F. Schrempel, T. Hche, and W. Wesch, "Annealing behavior of lithium niobate irradiated with He-ions at 100 k," Nucl. Instrum. Methods Phys. Res. B, vol. 267, no. 8, pp. 1492-1495, 2009.
43. M. Rinaldi, A. Tazzoli, J. Segovia-Fernandez, V. Felmetsger, and G. Piazza, "High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated AlN contour-mode MEMS resonator," in IEEE 25th Int. MEMS Conf., Feb. 2012, pp. 696-699.
44. R. Melamud, M. Hopcroft, C. Jha, B. Kim, S. Chandorkar, R. Candler, and T. Kenny, "Effects of stress on the temperature coefficient of frequency in double clamped resonators," in 13th Int. Solid-State Sens., Actuators, Microsystems Tech. Dig., Jun. 2005, vol. 1, pp. 392-395. (Pubitemid 41538509)
45. M. Patel, K. Bhattacharjee, J. Reed, and S. Zhgoon, "Temperature compensation of longitudinal leaky SAW with silicon dioxide overlay," in IEEE Ultrason. Symp., Nov. 2008, pp. 1006-1010.
46. J. Segovia-Fernandez, A. Tazzoli, M. Rinaldi, and G. Piazza, "Nonlinear lumped electrical model for contour mode AlN resonators," in IEEE Int. Ultrason. Symp., Oct. 2011, pp. 1846-1849.