Oriented lithium niobate layers transferred on 4″ (100) silicon wafer for RF SAW devices

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 131-134

  Solal, M ^b   Pastureaud, Th ^b   Ballandras, S ^a   Aspar, B ^c   Biasse, B ^c   Daniau, W ^a   Hode, J M ^b   Calisti, S ^b   Laude, V ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b Thales Microsonics   (France)

^c CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; CRYSTAL LATTICES; ELASTIC WAVES; GREEN'S FUNCTION; LITHIUM NIOBATE; PERMITTIVITY; PIEZOELECTRIC DEVICES; SILICON WAFERS; SUBSTRATES; THIN FILMS;

LATTICE MATCHING; LAYER TRANSFER PROCESS; PIEZOELECTRIC WAFER;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0036992223     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. D. L. Dreifus, R. J. Higgins, R. B. Henard, R. Almar, L. P. Solie, "Experimental Observation of High Velocity Pseudo.-SAWs in ZnO/Diamond/Si Multilayers", Proc. IEEE Ultrason. Symp. (1997), pp. 191-194.
2. J. Lee, N. Little, T. Rabson, M. Robert, "Thin-film Lithium niobate on Diamond-coated silicon substrates for surface acoustic wave applications", Proc. IEEE Ultrason. Symp. (1999), pp. 269-272.
3. Th. Pastureaud, V. Laude, A. soufyane, S. Camou, S. Ballandras, D. Schenck, F. Semond, "AlN and GaN layers deposited on Sapphire and Silicon : theory and experiments", Proc. of the IEEE Ultrasonics Symp., pp. 293-297, 2000
4. Th. Pastureaud, V. Laude, S. Ballandras, "Stable scattering-matrix method for acoustic waves in piezoelectric multilayers", Appl. Phys. Lett., 80, 2544-2546 (2002).
5. B. Aspar, H. Moriceau, E. Jalaguier, C. Lagahe, A. Soubie, B. Biasse, A.M. Papon, A. Claverie, J. Grisolia, G. Benassayag, F. Letertre, O. Rayssac, T. Barge, C. Maleville, and B. Ghyselen, Journal of Electronic Materials, 30(7), 834 (2001).