Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Applied Physics Letters

Volumn 95, Issue 18, 2009, Pages

  Pijolat, M ^a   Loubriat, S ^a   Queste, S ^b   Mercier, D ^a   Reinhardt, A ^a   Defay E ^a   Deguet, C ^a   Clavelier, L ^a   Moriceau, H ^a   Aid M ^a   Ballandras, S ^b  

^a CEA GRENOBLE   (France)

^b FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE FILMS; CRYSTALLINE ORIENTATIONS; DEEP REACTIVE ION ETCHING; DIRECT BONDING; ELECTRO MECHANICAL COUPLING FACTORS; FILM BULK ACOUSTIC RESONATORS; LAYER TRANSFER; LITHIUM NIOBATE; TEST VEHICLE; ULTRA-WIDE BAND RADIOS;

ACOUSTIC RESONATORS; ACOUSTICS; ALUMINUM NITRIDE; ELECTROMECHANICAL COUPLING; NIOBIUM COMPOUNDS; NITRIDES; REACTIVE ION ETCHING; RESONATORS; SINGLE CRYSTALS;

ELECTROMECHANICAL DEVICES;

EID: 71049142299     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3258496     Document Type: Article

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