Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

IEEE Transactions on Microwave Theory and Techniques

Volumn 49, Issue 4 II, 2001, Pages 769-778

  Su, Qing Xin ^a   Kirby, Paul ^b   Komuro, Eiju ^c   Imura, Masaaki ^c   Zhang, Qi ^b   Whatmore, Roger ^b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b CRANFIELD UNIVERSITY   (United Kingdom)

^c TDK CORPORATION   (Japan)

Author keywords

Acoustic modeling; FBAR; FBAR filters; Mobile communications; PZT; Thin film bulk acoustic resonator

Indexed keywords

THIN-FILM BULK ACOUSTIC RESONATORS;

ACOUSTIC SURFACE WAVE FILTERS; LEAD; THIN FILMS; ZINC OXIDE; ZIRCONIUM;

ACOUSTIC RESONATORS;

EID: 0035304946     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.915462     Document Type: Article

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