One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 918-921

  Sorenson, L ^a   Fu, J L ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

acoustic bandgap; one dimensional; Phononic crystal; piezoelectric on silicon resonator; quality factor; support loss

Indexed keywords

ACOUSTIC BANDGAP; PHONONIC CRYSTAL; PIEZOELECTRIC-ON-SILICON RESONATOR; QUALITY FACTOR; SUPPORT LOSS;

ACOUSTIC TRANSDUCERS; ACTUATORS; ENERGY GAP; LABORATORIES; MICROSYSTEMS; PHONONS; RESONATORS; SOLID STATE DEVICES; SOLID-STATE SENSORS;

ACOUSTIC RESONATORS;

EID: 80052106192     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969685     Document Type: Conference Paper

References (12)

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