High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 696-699

  Rinaldi, M ^a   Tazzoli, A ^b   Segovia Fernandez, J ^b   Felmetsger, V ^c   Piazza, G ^b  

^a NORTHEASTERN UNIVERSITY   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

^c OEM Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; EXPERIMENTAL VERIFICATION; FREQUENCY VARIATION; HIGH-POWER; INNOVATIVE DESIGN; LOW PHASE NOISE; LOW TEMPERATURE COEFFICIENTS; MEMS RESONATORS; NO PHASE; NOISE DEGRADATIONS; POWER HANDLING; RESONATOR QUALITY; TEMPERATURE STABILITY;

DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES; TEMPERATURE;

PHASE NOISE;

EID: 84860463204     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170282     Document Type: Conference Paper

References (12)

1. C. T.-C. Nguyen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, no. 2, pp. 251-270, Feb. 2007.
2. G. Piazza, P. J. Stephanou, and A. P. Pisano, J. Microelectromech. Syst., vol. 15, no. 6, pp. 1406-1418, Dec. 2006.
3. M. Rinaldi, C. Zuniga, G. Piazza, Proc. 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Jan. 2009, pp. 916-919.
4. M. Rinaldi, C. Zuniga, C. Zuo and G. Piazza, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, no. 1, pp. 38-45, 2010.
5. M. Rinaldi, C. Zuo, J. Van der Spiegel, G. Piazza, IEEE Transactions on Electron Devices, vol. 58, n. 5, pp. 1281-1286, May 2011.
6. C-M. Lin, T. Yen, Y. Lai, V.V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, A. P. Pisano, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.57, no.3, pp.524-532, 2010.
7. J. R. Vig, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 40, n. 5, pp. 522-527, 1993.
8. J. Salvia, R. Melamud, S. Chandorkar, S. F. Lord, and T. W. Kenny, J. of Microelectromechanical Systems, Vol. 19, No. 1, pp. 192 - 201, 2010.
9. B. Kim, R. H. Olsson, K. E. Wojciechowski, Ultrasonics Symposium (IUS), 2010 IEEE, 11-14 Oct. 2010, pp. 974-978.
10. A. Tazzoli, M. Rinaldi, G. Piazza, Proc. IEEE International Electron Devices Meeting (IEDM 2011), in press., 2011.
11. J. Segovia-Fernandez, A. Tazzoli, M. Rinaldi, G. Piazza, Proc. IEEE International Ultrasonics Symposium (IUS 2011), in press., 2011.
12. J. D. Larson, III, P. D. Bradley, S. Wartenberg, and R. C. Ruby, Proc. IEEE Ultrason. Symp., Oct. 2000, pp. 863-868.