Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Corso, Christopher D ^a   Dickherber, Anthony ^b   Hunt, William D ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; BIOSENSORS; ELECTRIC EXCITATION; PIEZOELECTRIC MATERIALS; SHEAR WAVES; ZINC OXIDE;

ACOUSTIC WAVE DEVICES; LATERAL FIELD EXCITATION; PIEZOELECTRIC FILMS; THICKNESS SHEAR MODE (TSM);

THIN FILMS;

EID: 33947301305     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2562040     Document Type: Article

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