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Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 201-204

Large Qxfproduct for HBAR using smart cut transfer of LiNbO3 thin layers onto LiNbO3 substrate

(9) Pijolat, M a Reinhardt, A a Defay E a Deguet, C a Aïd, D Mercier M a Moulet, J S b Ghyselen, B b Gachon, D c Ballandras, S c

a CEA GRENOBLE (France)

b PARC TECHNOLOGIQUE DES FONTAINES (France)

c FEMTO ST INSTITUTE (France)

Author keywords

HBAR; Lithium niobate; Q f product; Smart Cut ; X cut

Indexed keywords

EXPERIMENTAL DATA; HBAR; LAYER TRANSFER; LITHIUM NIOBATE; Q F PRODUCT; QUALITY FACTORS; RF CHARACTERIZATION; SINGLE-CRYSTAL FILMS; SMART-CUT; SUBMICRON; THIN LAYERS; X-CUT;

NIOBIUM COMPOUNDS; SINGLE CRYSTALS;

LITHIUM;

EID: 67649319048 PISSN: 10510117 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/ULTSYM.2008.0049 Document Type: Conference Paper

Times cited : (40)

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