Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

Volumn , Issue , 2012, Pages 650-654

  Giovannini, Marco ^a,b   Yazici, Serkan ^a   Kuo, Nai Kuei ^a   Piazza, Gianluca ^c  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b POLITECNICO DI MILANO   (Italy)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN FILMS; APODIZATION TECHNIQUE; APODIZATIONS; BOTTOM ELECTRODES; CLOSE PROXIMITY; CONTOUR-MODE RESONATORS; ELECTROMECHANICAL COUPLING COEFFICIENTS; MECHANICAL RESONANCE; ONE-PORT RESONATORS; QUALITY FACTORS; SPURIOUS MODE SUPPRESSION; SPURIOUS RESPONSE; SUPPRESS SPURIOUS;

ALUMINUM; ALUMINUM NITRIDE; ELECTROMECHANICAL COUPLING; MATHEMATICAL TECHNIQUES; PLATINUM; THREE DIMENSIONAL COMPUTER GRAPHICS;

RESONATORS;

EID: 84866644446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2012.6243626     Document Type: Conference Paper

References (6)

1. G. Piazza, et al., "Piezoelectric Aluminum Nitride Vibrating Contour- Mode MEMS Resonators", J.MEMS, vol.15, p. 1406-1418, 2006
2. B.P. Harrignton, et al., "Toward ultimate performance in GHz MEMS Resonators: low impedance and high Q", J.MEMS, 2010 IEEE 23rd International Conference, p. 707-710, 2010
3. Y. Xie, et al., "1.52-GHz Micromechanical Extensional Wine-Glass Mode Ring Resonators", J.MEMS, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.55, p. 890-907, 2008
4. Olsson, et al., ''Origins and Mitigation of Spurious Modes in AlN Microresonators'', Proc. of the IEEE International Ultrasonics Symposium, p.1272-1276, October 2010
5. C.S. Hartmann, D.T. Bell, R.C., Rosenfeld, "Impulse Model Design of Acoustic. Surface-Wave Filters", IEEE Transactions on Sonics nd Ultrasonics, vol.20, p. 80-93, 1973
6. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Super-High-Frequency Two-Port AlN Contour-Mode Resonators for RF Applications" IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, no. 1, 2010..