High electromechanical coupling MEMS resonators at 530 MHz using ion sliced X-cut LiNbO 3 thin film

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2012, Pages

  Gong, Songbin ^a   Shi, Lisha ^a   Piazza, Gianluca ^a,b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

High electromechanical coupling; Lithium niobate; Piezoelectric resonators; Wideband filters

Indexed keywords

CENTER FREQUENCY; HIGHLY INTEGRATED; LATERAL VIBRATIONS; LITHIUM NIOBATE; MEMS RESONATORS; MICRO RESONATORS; MULTI FREQUENCY; PIEZOELECTRIC RESONATORS; SINGLE-CHIP; THEORETICAL PREDICTION; WIDE BAND FILTER; WIRELESS COMMUNICATIONS;

CRYSTAL RESONATORS; MICROELECTROMECHANICAL DEVICES; THIN FILMS; WIRELESS TELECOMMUNICATION SYSTEMS;

ELECTROMECHANICAL COUPLING;

EID: 84866790662     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2012.6259767     Document Type: Conference Paper

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