A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 671-674

  Zhu, Xinen ^a   Phillips, Jamie D ^a   Mortazawi, Amir ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

BST; Electrostriction; FBAR; Ferroelectric; Piezoelectricity; Resonators; Thin film

Indexed keywords

BARIUM COMPOUNDS; ELECTROSTRICTION; FERROELECTRIC FILMS; OPTIMIZATION; PIEZOELECTRICITY; THIN FILM DEVICES;

BARIUM STRONTIUM TITANATE (BST) THIN FILM; ELECTROSTRICTIVE RESONANCES;

ACOUSTIC RESONATORS;

EID: 34748870841     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380009     Document Type: Conference Paper

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