Nonlinear lumped electrical model for contour mode AlN resonators

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2011, Pages 1846-1849

  Segovia Fernandez, Jeronimo ^a   Tazzoli, Augusto ^a   Rinaldi, Matteo ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN contour mode resonator; amplitude frequency; Duffing equation; intermodulation distortion; lumped electrical model; nonlinearities; thermal effect

Indexed keywords

ALN RESONATORS; AMPLITUDE-FREQUENCY; CONTOUR MODE; CONTOUR-MODE RESONATORS; DUFFING EQUATIONS; ELECTRICAL MODELS; HIGH FREQUENCY MODULATION; NONLINEAR BEHAVIOR; NONLINEAR COEFFICIENT; THIRD ORDER INTERMODULATION DISTORTION;

ALUMINUM NITRIDE; EXPERIMENTS; INTERMODULATION DISTORTION; RESONATORS; THERMAL EFFECTS;

CONTROL NONLINEARITIES;

EID: 84869013816     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2011.0461     Document Type: Conference Paper

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