Performance comparison of Pb (Zr0.52Ti0.48) O 3 -only and Pb (Zr0.52Ti0.48) O3 -on-silicon resonators

Applied Physics Letters

Volumn 93, Issue 23, 2008, Pages

  Chandrahalim, Hengky ^a   Bhave, Sunil A ^a   Polcawich, Ronald ^b   Pulskamp, Jeff ^b   Judy, Daniel ^b   Kaul, Roger ^b   Dubey, Madan ^b  

^a Cornell University ^*  (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; LEAD; LEAD ALLOYS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; RESONATORS; SEMICONDUCTING LEAD COMPOUNDS; ZIRCONIUM;

DESIGN SPACES; FREQUENCY TUNING RANGES; INTERCEPT POINTS; LATERAL DIMENSIONS; LAYER THICKNESSES; LEAD ZIRCONIUM TITANATES; MODE RESONATORS; MOTIONAL IMPEDANCES; PERFORMANCE COMPARISONS; QUALITY FACTORS; QUANTITATIVE COMPARISONS; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RESONANT FREQUENCIES; SILICON LAYER THICKNESSES; SILICON RESONATORS;

PIEZOELECTRIC TRANSDUCERS;

EID: 57649139022     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3046717     Document Type: Article

References (13)

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