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Volumn 45, Issue 25, 2012, Pages

The 2012 plasma roadmap

(16)  Samukawa, Seiji a   Hori, Masaru b   Rauf, Shahid c   Tachibana, Kunihide d   Bruggeman, Peter e   Kroesen, Gerrit e   Whitehead, J Christopher f   Murphy, Anthony B j   Gutsol, Alexander F h   Starikovskaia, Svetlana i   Kortshagen, Uwe g   Boeuf, Jean Pierre k   Sommerer, Timothy J l   Kushner, Mark J m   Czarnetzki, Uwe n   Mason, Nigel o  


Author keywords

[No Author keywords available]

Indexed keywords

APPLIED PHYSICS; DAILY LIVES; FUNDING AGENCIES; FUTURE CHALLENGES; GOVERNMENT INSTITUTIONS; INDUSTRIAL PRODUCTION; INTERDISCIPLINARY FIELDS; KEY TOPICS; LOW TEMPERATURE PLASMAS; MICROELECTRONIC INDUSTRY; NEW APPLICATIONS; NOVEL CONCEPT; ORDERS OF MAGNITUDE; PLASMA PARAMETER; PLASMA SCIENCE; RESEARCH AND DEVELOPMENT; ROAD-MAPS; ROADMAP; SCIENCE AND TECHNOLOGY; STATE OF THE ART;

EID: 84862531478     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/25/253001     Document Type: Review
Times cited : (559)

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