Microplasma stamps for selective surface modification: Design and characterization

Journal of Physics D: Applied Physics

Volumn 41, Issue 21, 2008, Pages

  Lucas, N ^a   Ermel, V ^a   Kurrat, M ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; DESIGN; ELECTRIC CONDUCTIVITY; IONIZATION OF GASES; METEOROLOGY; MICROCHANNELS; PLASMA DEVICES; PLASMA DISPLAY DEVICES; PLASMAS; SILICONES; SURFACE DISCHARGES;

BREAK DOWN VOLTAGES; CLOSED CAVITIES; DIELECTRIC BARRIER DISCHARGES; DIELECTRIC BARRIERS; FEM MODELS; MEDIUM FREQUENCIES; MICROSTRUCTURING; PROCESS STEPS; SELECTIVE SURFACES; STAMP DESIGNS;

SURFACE TREATMENT;

EID: 58149314326     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/21/215202     Document Type: Article

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