Anomalous evolution of Ar metastable density with electron density in high density Ar discharge

Physics of Plasmas

Volumn 18, Issue 10, 2011, Pages

  Park, Min ^a   Chang, Hong Young ^a   You, Shin Jae ^b   Kim, Jung Hyung ^b   Shin, Yong Hyeon ^c  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

AR METASTABLE ATOMS; DOMINANT MECHANISM; ELECTRON DENSITIES; GLOBAL MODELS; HIGH DENSITY; METASTABLE ATOMS; PLASMA DISCHARGE;

CARRIER CONCENTRATION; DENSITY FUNCTIONAL THEORY; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; ELECTRONS;

POPULATION STATISTICS;

EID: 80655125530     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3640518     Document Type: Article

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